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ISO 14644-1:1999, Cleanrooms and associated controlled environments -- Part 1: Classification of air cleanliness

ISO TC 209/WG 1




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This part of ISO 14644 covers the classification of air cleanliness in cleanrooms and associated controlled environments exclusively in terms of concentration of airborne particles. Onlyparticlepopulationshavingcumulativedistributionsbased on threshold (lower limit) sizes ranging from 0,1 μm to 5 μm are considered for classification purposes.This part of ISO 14644 does not provide for classification of particle populations that are outside of the specified particle siz...

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