[PDF.69vf] Shape and Functional Elements of the Bulk Silicon Microtechnique: A Manual of Wet-Etched Silicon Structures

Shape and Functional Elements of the Bulk Silicon Microtechnique: A Manual of Wet-Etched Silicon Structures

[PDF.ee87] Shape and Functional Elements of the Bulk Silicon Microtechnique: A Manual of Wet-Etched Silicon Structures

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 | #12516001 in Books |  Springer |  2004-11-23 | Original language:English | PDF # 1 |  9.21 x.56 x6.14l,1.00 | File type: PDF | 222 pages

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||From the Back Cover||This methodic manual presents a survey of the form-related and functional elements of the bulk silicon microtechnique. It gives a systematic description of simple shape elements and of elements for mechanical, fluidic and optical application

The idea for this manual was created by the author and Birgit Hannemann (now Professor at the University of Applied Sciences, Bremen, Germany) as an internal catalogue of results of several years of investigations at the Chemnitz University of Technology, Germany. At this base supplying investigations and the elabo- tion of the manuscript were supported by the Stiftung Industrieforschung, Bonn, Germany. In the course of this the coworkers of the author Eva Gartner, Steff...

You can specify the type of files you want, for your gadget.Shape and Functional Elements of the Bulk Silicon Microtechnique: A Manual of Wet-Etched Silicon Structures   |  Joachim Frühauf. I have read it a couple of times and even shared with my family members. Really good. Couldnt put it down.

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